ELECTRON BEAM PHYSICAL DEPOSITION SYSTEM CAPABLE OF THIN FILM METALLIC, DIELECTRIC AND SEMICONDUCTOR MATERIAL DEPOSITION

Research institute: UPNA-Institute of Smart Cities
Manufacturer: Angstrom Engineering
Model: PVD-NEXDEP
Location: Sala Limpia. Edificio I+D Jerónimo de Ayanz. Campus Arrosadia. UPNA. Pamplona.